831-462-8900
8:30am–5pm PST Mon–Fri
Provac Icon
Created with Sketch.
Provac Logo
SHOP BY BRAND
SHOP BY TYPE
PUMP REPAIR
a
831-462-8900
8:30am–5pm PST Mon–Fri
Provac
Shop
Edwards
Edwards GX100L Dry Pump
Edwards GX100L Dry Pump
Pricing and lead time confirmed with inquiry
Type of Product
: Dry Pump
Manufacturer
: Edwards
Condition
: New
Price
: ASK
Inlet
: ISO63
Exhaust
: KF25
Pumping speed
: 62 CFM
Ultimate pressure
: 3.75 x 10-3 Torr
Weight
: 264 lbs
*Other Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
TECHNICAL SHEET
Share
Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process & pre-clean • RTA • stripping/ashing • oxide, silicon, metal etch • implant source • clean applications