Edwards
Edwards GX100L Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO63
- Exhaust: KF25
- Pumping speed: 62 CFM
- Ultimate pressure: 3.75 x 10-3 Torr
- Weight: 264 lbs
- *Other Configurations Available Upon Request
TECHNICAL SHEET
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process & pre-clean • RTA • stripping/ashing • oxide, silicon, metal etch • implant source • clean applications |
