Edwards GX100N Dry Pump Image 1

Edwards GX100N Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: New
  • Price: ASK
  • *Other Configurations Available Upon Request
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Technical Specs

Motor 200-230V, 50/60 Hz
Peak pumping speed 62 CFM
Ultimate pressure 3.75 x 10-3 Torr
Weight 265 lbs
Applications Load Lock, Transfer, Metrology, Lithography, PVD Process/Pre-Clean, RTA, Strip/Ashing, Oxide/Metal Etch, Implant Source