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Edwards
Edwards iGX-100M Dry Pump
Edwards iGX-100M Dry Pump
Pricing and lead time confirmed with inquiry
Type of Product
: Dry Pump
Manufacturer
: Edwards
Condition
: New
Price
: ASK
Inlet
: ISO63
Exhaust
: KF25
Pumping speed
: 62 CFM
Ultimate pressure
: 3.75 x 10-3 Torr
Weight
: 265 lbs
*Additional Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
TECHNICAL SHEET
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Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source