Edwards
Edwards iGX-100M Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO63
- Exhaust: KF25
- Pumping speed: 62 CFM
- Ultimate pressure: 3.75 x 10-3 Torr
- Weight: 265 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source |
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