Edwards

Edwards iGX-100M Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of product: dry pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: ASK
  • Inlet: ISO63
  • Exhaust: KF25
  • Pumping speed: 62 CFM
  • Ultimate pressure: 3.75 x 10-3 Torr
  • Weight: 265 lbs
  • *Additional Configurations Available Upon Request
OUT OF STOCK
MANUAL
TECHNICAL SHEET

Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source
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