Edwards
Edwards iGX-100M Dry Pump, Rebuilt
$ 17,500.00
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: rebuilt
- Price: $17,500.00
- Inlet: ISO63
- Exhaust: KF25
- Motor: 3 Phase, 200-230V, 50/60Hz
- Pumping speed: 62 CFM
- Ultimate pressure: 3.75 x 10-3 Torr
- Weight: 265 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source |
HAVE QUESTIONS?
GET IN TOUCH
We can answer them for you.
