Edwards
Edwards iGX-100M Dry Pump, Rebuilt
$ 14,500.00
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: rebuilt
- Price: $17,500.00
- Inlet: ISO63
- Exhaust: KF25
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source |
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