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Edwards
Edwards iH-1000 Dry Pump, Rebuilt
Edwards iH-1000 Dry Pump, Rebuilt
$ 21,089.00
Type of Product
: dry pump
Manufacturer
: Edwards
Condition
: rebuilt
Price
: $21,089.00
Inlet
: ISO100
Exhaust
: KF40
Motor
: 3 Phase, 208V, 50/60Hz
Pumping speed
: 589 CFM (60Hz)
Ultimate pressure
: 7.5 x 10-4 Torr
Weight
: 948 lbs
*Additional Configurations Available Upon Request
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MANUAL
TECHNICAL SHEET
iH-1000 - $ 21,089.00
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Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD