Edwards iH-1000 Dry Pump, Rebuilt

$ 21,089.00

  • Type of Product: dry pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $21,089.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 3 Phase, 208V, 50/60Hz
  • Pumping speed: 589 CFM (60Hz)
  • Ultimate pressure: 7.5 x 10-4 Torr
  • Weight: 948 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD