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8:30am–5pm PST Mon–Fri
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Edwards
Edwards iH-160 Dry Pump
Edwards iH-160 Dry Pump
Pricing and lead time confirmed with inquiry
Type of Product
: Dry Pump
Manufacturer
: Edwards
Condition
: New
Price
: ASK
Inlet
: ISO100
Exhaust
: KF40
Pumping speed
: 353 CFM (60Hz)
Ultimate pressure
: 5.3 x 10-4 Torr
Weight
: 915 lbs
*Additional Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
TECHNICAL SHEET
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Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD