Edwards
Edwards iH-160 Dry Pump
Pricing and lead time confirmed with inquiry
- Type of Product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO100
- Exhaust: KF40
- Pumping speed: 353 CFM (60Hz)
- Ultimate pressure: 5.3 x 10-4 Torr
- Weight: 915 lbs
- *Additional Configurations Available Upon Request
TECHNICAL SHEET
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD |
