Edwards iH-160 Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: dry pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: ASK
  • Inlet: ISO100
  • Exhaust: KF40
  • Pumping speed: 353 CFM (60Hz)
  • Ultimate pressure: 5.3 x 10-4 Torr
  • Weight: 915 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD