Edwards

Edwards iL-70 Dry Pump, Rebuilt

$ 8,868.00

  • Type of product: dry pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $8,868.00
  • Inlet: ISO63 bolted
  • Exhaust: KF40
  • Pumping speed: 49.4 CFM (60Hz)
  • Ultimate pressure: 2.25 x 10-2 Torr (60Hz)
  • Weight: 507 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Applications semiconductor fabrication processes • load lock • transfer chamber • PVD • SEM
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