Edwards
Edwards iPX-180A Dry Pump, Rebuilt
$ 13,519.00
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: rebuilt
- Price: $13,519.00
- Inlet: ISO63
- Exhaust: KF25
- Pumping speed: 103 CFM
- Ultimate pressure: < 7.5 x 10-5 Torr
- Weight: 130 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | load lock • transfer chamber • PVD sputtering • ashing • stripping • dielectric etch • beam & target implant • clean environments where fan cooling is unacceptable |
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