Edwards
Edwards iXH-1820T Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO160
- Exhaust: KF40
- Pumping speed: 1,000.58 CFM
- Ultimate pressure: 3.7 x 10-3 Torr
- Weight: 1,043 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • stripping/ashing • oxide etch • silicon etch • metal etch • implant source • HPD-CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD |
HAVE QUESTIONS?
GET IN TOUCH
We can answer them for you.
