Edwards iXH-200H Dry Pump Image 1

Edwards iXH-200H Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: New
  • Price: ASK
  • Inlet: ISO63
  • Exhaust: KF40
  • Pumping speed: 126.54 CFM
  • Ultimate pressure: 7.5 x 10-3 Torr
  • Weight: 632 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • stripping/ashing • oxide etch • silicon etch • metal etch • implant source • HPD-CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD