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Edwards iXH-3030T Dry Pump
Edwards iXH-3030T Dry Pump
Pricing and lead time confirmed with inquiry
Type of Product
: dry pump
Manufacturer
: Edwards
Condition
: new
Price
: ASK
Inlet
: ISO160
Exhaust
: KF40
Pumping speed
: 1,618.58 CFM
Ultimate pressure
: 3.7 x 10-3 Torr
Weight
: 1,375 lbs
*Other Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
TECHNICAL SHEET
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Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • stripping/ashing • oxide etch • silicon etch • metal etch • implant source • HPD-CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD