Edwards iXH-3030T Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: dry pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: ASK
  • Inlet: ISO160
  • Exhaust: KF40
  • Pumping speed: 1,618.58 CFM
  • Ultimate pressure: 3.7 x 10-3 Torr
  • Weight: 1,375 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • stripping/ashing • oxide etch • silicon etch • metal etch • implant source • HPD-CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD