Edwards
Edwards iXH-610 Dry Pump
Pricing and lead time confirmed with inquiry
- Type of Product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO100
- Exhaust: KF40
- Pumping speed: 391.40 CFM
- Ultimate pressure: 3.7 x 10-3 Torr
- Weight: 782 lbs
- *Other Configurations Available Upon Request
TECHNICAL SHEET
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • stripping/ashing • oxide etch • silicon etch • metal etch • implant source • HPD-CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD |
