831-462-8900
8:30am–5pm PST Mon–Fri
Provac Icon
Created with Sketch.
Provac Logo
SHOP BY BRAND
SHOP BY TYPE
PUMP REPAIR
a
831-462-8900
8:30am–5pm PST Mon–Fri
Provac
Shop
Edwards
Edwards iXH-610 Dry Pump
Edwards iXH-610 Dry Pump
Pricing and lead time confirmed with inquiry
Type of Product
: dry pump
Manufacturer
: Edwards
Condition
: new
Price
: ASK
Inlet
: ISO100
Exhaust
: KF40
Pumping speed
: 391.40 CFM
Ultimate pressure
: 3.7 x 10-3 Torr
Weight
: 782 lbs
*Other Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
TECHNICAL SHEET
Share
Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • stripping/ashing • oxide etch • silicon etch • metal etch • implant source • HPD-CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD