Edwards
Edwards iXL-120 Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO63 vertical
- Exhaust: KF25
- Pumping speed: 65 CFM
- Ultimate pressure: 0.01 Torr
- Weight: 130 lbs
- *Other Configurations Available Upon Request
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • wafer handling • clean applications |
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