Edwards iXL-120 Dry Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: Dry Pump
  • Manufacturer: Edwards
  • Condition: New
  • Price: ASK
  • Inlet: ISO63 vertical
  • Exhaust: KF25
  • Pumping speed: 65 CFM
  • Ultimate pressure: 0.01 Torr
  • Weight: 130 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • wafer handling • clean applications