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831-462-8900
8:30am–5pm PST Mon–Fri
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Edwards
Edwards iXL-120 Dry Pump
Edwards iXL-120 Dry Pump
Pricing and lead time confirmed with inquiry
Type of Product
: dry pump
Manufacturer
: Edwards
Condition
: new
Price
: ASK
Inlet
: ISO63 vertical
Exhaust
: KF25
Pumping speed
: 65 CFM
Ultimate pressure
: 0.01 Torr
Weight
: 130 lbs
*Other Configurations Available Upon Request
PROCEED WITH ORDER
MANUAL
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Technical Specs
Applications
load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • wafer handling • clean applications