Edwards QDP-80 Dry Pump, Rebuilt

$ 7,470.00

  • Type of Product: dry pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $7,470.00
  • Inlet: KF40
  • Exhaust: KF40
  • Motor: 3 Phase, 200-230/460V, 50/60Hz
  • Oil: PFPE
  • Pumping speed: 64.6 CFM (60Hz)
  • Ultimate vacuum: 2.25 x 10-2 Torr (without gas ballast)
  • Weight: 446 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Applications semiconductor processing • freeze drying • vacuum deposition • research & development • sputtering • load lock chambers • vacuum furnaces • chemical processes • ion implanters • plasma etch • LPCVD