Edwards STP-1003C Turbo Pump
$ 26,740.00
- Type of product: turbo pump
- Manufacturer: Edwards
- Condition: new
- Price: $26,740.00
- Part number: YT39B0130
- Inlet: ISO200F
- Exhaust: KF40
- Vent: KF10
- Pumping speed: 1,000 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Ultimate pressure: 5 x 10-8 Torr
- Weight: 69 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | SCU-750 • SCU-800 |
| Recommended backing pump | E2M28 • E2M30 |
| Applications | plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers |
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