Edwards STP-300H Turbo Pump, Factory Rebuilt

Pricing and lead time confirmed with inquiry

  • Type of product: turbo pump
  • Manufacturer: Edwards
  • Condition: factory rebuilt
  • Price: ASK
  • Part number: PT010Z000R
  • Inlet: ISO100
  • Exhaust: KF25
  • Pumping speed: 340 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-300
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers