Edwards STP-301CB1 Turbo Pump

$ 14,276.00

  • Type of product: turbo pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: $14,276.00
  • Part number: N040-67-910
  • Inlet: ISO100K
  • Exhaust: KF40
  • Purge: KF10
  • Pumping speed: 300 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 24 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Recommended controller SCU-21 • SCU-301C
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers
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