Edwards STP-603 Turbo Pump

$ 20,085.00

  • Type of Product: turbo pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: $20,085.00
  • Inlet: ISO160
  • Exhaust: KF40
  • Pumping speed: 650 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 68 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-800
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers • high energy physics • surface analysis • mass spectrometry • electron microscopy • semiconductor