Edwards STP-603C Turbo Pump
$ 24,550.00
- Type of product: turbo pump
- Manufacturer: Edwards
- Condition: new
- Price: $24,550.00
- Inlet: ISO160
- Exhaust: KF40
- Pumping speed: 650 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Ultimate pressure: 5 x 10-8 Torr
- Weight: 68 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | SCU-800 |
| Applications | plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers • high energy physics • surface analysis • mass spectrometry • electron microscopy • semiconductor |
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