Edwards STP-A1303C Turbo Pump

$ 26,744.00

  • Type of product: turbo pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: $26,744.00
  • Pumping speed: 1,300 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 86 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Recommended controller SCU-800
Applications semiconductor • coating • scientific research & development • LED • metallurgy • solar • flat panel display • plasma etch for metal • ion implantation source • film deposition • diffusion • load lock chambers • surface analysis • mass spectrometry • high energy physics
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