Edwards STP-H1000WA Turbo Pump, Rebuilt

$ 26,497.00

  • Type of Product: turbo pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $26,497.00
  • Inlet: ISO200F
  • Exhaust: KF40
  • Vent valve: KF25
  • Pumping speed: 1,000 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 71 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Recommended backing pump QDP-40
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / epitaxial growth • wafer inspection • load lock chambers