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Kinney KVO 100 Rotary Vane Pump
$ 6,194.00
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Turbo Pumps
Edwards STP-iXA3306CV Turbo Pump
Edwards STP-iXA3306CV Turbo Pump
$ 31,094.00
Type of product
: turbo pump
Manufacturer
: Edwards
Condition
: new
Price
: $31,094.00
Inlet
: ISO250F
Exhaust
: KF40
Pumping speed
: 2,650 l/s (N2)
Compression ratio
: > 10^8 (N2)
Ultimate pressure
: 1 x 10-9 Torr
Weight
: 176 lbs
*Other Configurations Available Upon Request
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MANUAL
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Technical Specs
Applications
plasma etch • ECR etch • film deposition • sputtering • ion implantation source
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