Edwards STP-XA3203C Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: turbo pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: ASK
  • Inlet: ISO320F
  • Exhaust: KF40
  • Pumping speed: 3,200 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 176 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-1400 • SCU-1500
Applications semiconductor etch • implant • lithography • LCD processes • diffusion • high energy physics • load lock chambers • surface analysis • mass spectrometry • electron microscopy