Compatible controller | SCU-1400 • SCU-1500 |
Applications | plasma etch for metal, tungsten & dielectric oxide & polysilicon • electron cyclotron resonance etch • film deposition • sputtering • ion implantation source • beam line pumping end station • MBE • diffusion • photo resist stripping • crystal/epitaxial growth • wafer inspection • load lock chambers • surface analysis • mass spectrometry • electron microscopy • high energy physics |