Edwards STP-XA4503C Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of product: turbo pump
  • Manufacturer: Edwards
  • Condition: new
  • Price: ASK
  • Inlet: ISO320F
  • Exhaust: KF40
  • Pumping speed: 4,000 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 231 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Compatible controller SCU-1400 • SCU-1500
Applications plasma etch for metal, tungsten & dielectric oxide & polysilicon • electron cyclotron resonance etch • film deposition • sputtering • ion implantation source • beam line pumping end station • MBE • diffusion • photo resist stripping • crystal/epitaxial growth • wafer inspection • load lock chambers • surface analysis • mass spectrometry • electron microscopy • high energy physics