Edwards STP-XA4503C Turbo Pump
Pricing and lead time confirmed with inquiry
- Type of product: turbo pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO320F
- Exhaust: KF40
- Pumping speed: 4,000 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Ultimate pressure: 1 x 10-9 Torr
- Weight: 231 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Compatible controller | SCU-1400 • SCU-1500 |
| Applications | plasma etch for metal, tungsten & dielectric oxide & polysilicon • electron cyclotron resonance etch • film deposition • sputtering • ion implantation source • beam line pumping end station • MBE • diffusion • photo resist stripping • crystal/epitaxial growth • wafer inspection • load lock chambers • surface analysis • mass spectrometry • electron microscopy • high energy physics |
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