Pfeiffer

Pfeiffer A1803H Dry Pump, Rebuilt

$ 29,931.00

  • Type of Product: dry pump
  • Manufacturer: Pfeiffer
  • Condition: rebuilt
  • Price: $29,931.00
  • Inlet: ISO160
  • Exhaust: KF40
  • Motor: 3 Phase, 200-208V, 50/60Hz
  • Pumping speed: 1,000 CFM (60Hz)
  • Ultimate pressure: 3.75 x 10-6 Torr (60Hz)
  • Weight: 1,201 lbs
  • *1 week lead time
  • *Other Configurations Available Upon Request

Technical Specs

Applications metal etching • CVD processes (PECVD, SACVD, LPCVD) • ALD • diffusion processes • epitaxy • semiconductor
HAVE QUESTIONS?

We can answer them for you.

GET IN TOUCH
Vacuum Pump Repair Questions