Pfeiffer A803H Dry Pump, Rebuilt

$ 18,746.00

  • Type of Product: dry pump
  • Manufacturer: Pfeiffer
  • Condition: rebuilt
  • Price: $18,746.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 3 Phase, 200-208V, 50/60Hz
  • Pumping speed: 412 CFM (60Hz)
  • Ultimate pressure: 3.75 x 10-6 Torr (60Hz)
  • Weight: 849 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Applications metal etching • CVD processes (PECVD, SACVD, LPCVD) • ALD • diffusion processes • epitaxy • semiconductor