Pfeiffer ATH-1300M Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: turbo pump
  • Manufacturer: Pfeiffer
  • Condition: new
  • Price: ASK
  • Inlet: ISO200F
  • Exhaust: KF40
  • Purge: KF16
  • Pumping speed: 1,250 l/s (N2)
  • Compression ratio: 1 x 10^7 (N2)
  • Ultimate pressure: 6 x 10-9 Torr
  • Weight: 76 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended backing pump ADP • ADS
Recommended controller Magpower • ACT-1300M
Applications glass coating • micro machining systems • research & development • electron microscopy • space simulation chambers • particle accelerators • semiconductor processes (etch, CVD, ion implant) • coating & thin films deposition • ion milling • ion beam rectification