Pfeiffer
Pfeiffer ATH-1300MT Turbo Pump
$ 39,475.00
- Type of product: turbo pump
- Manufacturer: Pfeiffer
- Condition: new
- Price: $39,475.00
- Part number: M6562103
- Inlet: ISO200F
- Exhaust: KF40
- Pumping speed: 1,250 l/s (N2)
- Compression ratio: 1 x 10^7 (N2)
- Ultimate pressure: 6 x 10-9 Torr
- Weight: 76 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended backing pump | ADP • ADS |
| Recommended controller | Magpower • ACT-1300M |
| Applications | glass coating • micro machining systems • research & development • electron microscopy • space simulation chambers • particle accelerators • semiconductor processes (etch, CVD, ion implant) • coating & thin films deposition • ion milling • ion beam rectification |
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