Pfeiffer ATH-3200M Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of product: turbo pump
  • Manufacturer: Pfeiffer
  • Condition: new
  • Price: ASK
  • Inlet: VG350
  • Pumping speed: 2,800 l/s (N2)
  • Compression ratio: > 1 x 10^8 (N2)
  • Ultimate pressure: < 4.5 x 10-9 Torr
  • Weight: 188 lbs
  • *Additional Configurations Available Upon Request
MANUAL
TECHNICAL SHEET

Technical Specs

Recommended controller Magpower
Recommended backing pump ADP • ADS
Applications semiconductor • photovoltaic • FPD • glass coating • thin film coating • CVD, PVD, HPDCVD • deposition • industrial • space simulation
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