Pfeiffer Pascal 2015C2 Rotary Vane Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: vane pump
  • Manufacturer: Pfeiffer
  • Condition: new
  • Price: ASK
  • Inlet: KF25
  • Exhaust: KF25
  • Pumping speed: 10.6 CFM (60Hz)
  • Ultimate pressure: 2.25 x 10-3 Torr (gas ballast closed)
  • Weight: 60 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Applications plasma/dry etching • reactive sputtering • ion implantation • PECVD • freeze drying • CVD • LPCVD • load lock • oxygen pumping