Pfeiffer
| Recommended controllers | TPS-150 • DCU-150 |
| Recommended backing pumps | MVP 015-2 • MVP 035-2 • MVP 055-3 • DUO 5 |
| Applications | semiconductor processes • thin film coatings • mass spectrometry • process gas monitors • research and development • UHV technology • HV technology • vacuum processing • accelerators • fusion |