Seiko Seiki
Recommended controller | SCU-750 • SCU-800 |
Recommended backing pump | E2M28 • E2M30 |
Applications | plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers |