Seiko Seiki STP-200 Turbo Pump, Rebuilt
$ 5,871.00
- Type of Product: Turbo Pump
- Manufacturer: Seiko Seiki
- Condition: Rebuilt
- Price: $5,871.00
- Inlet: ISO100
- Exhaust: KF25
- Pumping speed: 270 l/s (N2)
- Compression ratio: 1 x 10^8 (N2)
- Weight: 27 lbs
- *Additional Configurations Available Upon Request
Technical Specs
| Recommended controller | SCU-300 |
| Recommended backing pump | E2M12 |
| Applications | plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers |