Seiko Seiki

Seiko Seiki STP-301 Turbo Pump, Rebuilt

$ 11,031.00

  • Type of product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: $11,031.00
  • Part number: B748-30-020
  • Inlet: ISO100
  • Exhaust: KF25
  • Pumping speed: 300 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Recommended controller SCU-350
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers
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