Seiko Seiki STP-301C Turbo Pump, Rebuilt

$ 10,300.00

  • Type of Product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: $10,300.00
  • Inlet: ISO100
  • Exhaust: KF25
  • Pumping speed: 300 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-350
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers