| Pumping Speed |
N2: 300 l/s, He: 280 l/s, H2: 300 l/s |
| Compression Ratio |
N2: >10E+8, He: 5X10E+5, H2: 2X10E+4 |
| Ultimate Pressure Without Anti-Corrosion Treatment |
ICF Flange: 10-10 Torr, VG/ISO Flange: 5X10-8 Torr |
| Ultimate Pressure Chemical Specific |
ICF Flange: 10-9 Torr, VG/ISO Flange: 5X10-8 Flange |
| Rated Speed |
25000 to 48000 rpm |
| Installation Position |
Free |
| Recommended Controller |
SCU-301 |
| Mass |
11kg/25lbs. |
| Applications Include |
Plasma Etch, Electron Cyclotron Resonance, Film Deposition, Sputtering, Ion Implantation.
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