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Turbo Pumps
Seiko Seiki STP-301CVB3 Turbo Pump, Rebuilt
Seiko Seiki STP-301CVB3 Turbo Pump, Rebuilt
$ 12,566.00
Type of Product
: Turbo Pump
Manufacturer
: Seiko Seiki
Condition
: Rebuilt
Price
: $12,566.00
Part Number
: PT219Z100
Inlet
: ISO100
Exhaust
: KF40
Vent Valve
: fixed
Pumping speed
: 280 l/s (N2)
Compression ratio
: > 10^8 (N2)
Ultimate pressure
: 5 x 10-8 Torr
Weight
: 24 lbs
*Other Configurations Available Upon Request
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Technical Specs
Recommended controller
SCU-301
Applications
plasma etch • electron cyclotron resonance • film deposition • sputtering • ion implantation