Seiko Seiki STP-301CVB3 Turbo Pump, Rebuilt

$ 13,194.00

  • Type of Product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: $13,194.00
  • Part number: PT219Z100
  • Inlet: ISO100
  • Exhaust: KF40
  • Vent valve: fixed
  • Pumping speed: 280 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 5 x 10-8 Torr
  • Weight: 24 lbs
  • *Other Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-301
Applications plasma etch • electron cyclotron resonance • film deposition • sputtering • ion implantation