Seiko Seiki STP-400 Turbo Pump, Rebuilt

$ 6,386.00

  • Type of Product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: $6,386.00
  • Inlet: ISO160
  • Exhaust: KF25
  • Pumping speed: 420 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-300
Recommended backing pump E2M12
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers