Seiko Seiki STP-451C Low Field Turbo Pump, Rebuilt

$ 11,031.00

  • Type of product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: $11,031.00
  • Part number: B74852000
  • Inlet: ISO160
  • Exhaust: KF40
  • Vent: KF10
  • Pumping speed: 480 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Additional Configurations Available Upon Request
QUANTITY
Share

Technical Specs

Recommended controller SCU-21
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers