Seiko Seiki

Seiko Seiki STP-600C Turbo Pump, Rebuilt

Pricing and lead time confirmed with inquiry

  • Type of product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: ASK
  • Inlet: 11" ASA
  • Exhaust: KF40
  • Pumping speed: 650 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 7.5 x 10-10 Torr
  • Weight: 66 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact

Technical Specs

Recommended controller SCU-600
Recommended backing pump E2M18
Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers
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