Seiko Seiki STP-A803C Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: new
  • Price: ASK
  • Inlet: ISO160F
  • Exhaust: KF40
  • Purge: KF10
  • Pumping speed: 800 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 86 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-800
Applications semiconductor • coating • scientific research & development • LED • metallurgy • solar • flat panel display • plasma etch for metal • ion implantation source • film deposition • diffusion • load lock chambers • surface analysis • mass spectrometry • high energy physics