Seiko Seiki
Seiko Seiki STP-A803CV Turbo Pump, Rebuilt
$ 21,846.00
- Type of product: turbo pump
- Manufacturer: Seiko Seiki
- Condition: rebuilt
- Price: $21,846.00
- Inlet: ISO160F
- Exhaust: KF40
- Vent valve: fixed
- Pumping speed: 800 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Ultimate pressure: 1 x 10-9 Torr
- Weight: 86 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | SCU-800 |
| Applications | semiconductor • coating • scientific research & development • LED • metallurgy • solar • flat panel display • plasma etch for metal • ion implantation source • film deposition • diffusion • load lock chambers • surface analysis • mass spectrometry • high energy physics |
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