Seiko Seiki STP-H1303CV3 Turbo Pump

Pricing and lead time confirmed with inquiry

  • Type of Product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: new
  • Price: ASK
  • Inlet: ISO200F
  • Exhaust: KF40
  • Pumping speed: 1,300 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 86 lbs
  • *Additional Configurations Available Upon Request
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Technical Specs

Recommended controller SCU-750 • SCU-800
Applications plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers