Seiko Seiki STP-H301C Turbo Pump Image 1

Seiko Seiki STP-H301C Turbo Pump

$ 10,200.00

  • Type of Product: Turbo Pump
  • Manufacturer: Seiko Seiki
  • Price: $10,200.00
  • *Additional Configurations Available Upon Request

Technical Specs

Inlet ISO100K
Pumping speed (N2) 300 l/s
Compression ratio (N2) > 10^8
Ultimate pressure 1 x 10-9 Torr
Weight 33 lbs
Applications Plasma Etch for Metal, Tungsten and Dielectric Oxide and Polysilicon, Electron Cyclotron Resonance Etch, Film Deposition, Sputtering, Ion Implantation Source, Beam Line Pumping End Station, MBE, Diffusion, Photo Resist Stripping, Crystal/Epitaxial Growth, Wafer Inspection, Load Lock Chambers, Surface Analysis, Mass Spectrometry, Electron Microscopy, High Energy Physics