Seiko Seiki

Seiko Seiki STP-L451C Turbo Pump, Rebuilt

$ 10,815.00

  • Type of product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: rebuilt
  • Price: $10,815.00
  • Inlet: ISO160
  • Exhaust: KF25
  • Pumping speed: 450 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 5 x 10-8 Torr
  • Weight: 31 lbs
  • *Additional Configurations Available Upon Request

Technical Specs

Compatible controller SCU-350
Applications plasma etch • electron cyclotron resonance (ECR) etch • film deposition CVD, PECVD, ECRCVD, MOCVD • sputtering • ion implantation source, beam line pumping end station • MBE • diffusion • photo resist stripping • crystal/epitaxial growth • wafer inspection • load lock chambers • scientific instruments: surface analysis, mass spectrometry, electron microscopy • high energy physics: beam lines, accelerators
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