Agilent Diffusion Pumps

Agilent Diffusion Pumps for High and Ultra-High Vacuum

Agilent diffusion pumps have earned a lasting reputation for one simple reason. They move gas into the high vacuum range with no moving parts in the vacuum path, which means no bearings to wear out, no rotors to balance, and almost no vibration reaching your chamber. For anyone running a coating line, a vacuum furnace, or a sensitive analytical instrument, that combination of deep vacuum and mechanical simplicity is hard to beat.

At Provac, we stock both new and fully rebuilt Agilent diffusion pumps, and we back every rebuilt unit with a warranty. We also carry the diffusion pump fluids, heaters, and replacement parts that keep these pumps performing year after year. If you already own a diffusion pump that has slowed down or contaminated its fluid, our technicians can rebuild it and return it to you running like new.

How an Agilent Diffusion Pump Works

The principle behind a diffusion pump is elegant. A boiler at the base of the pump heats a specialized fluid until it vaporizes. That vapor rises through a central stack and shoots downward through a series of angled nozzles at high speed. As gas molecules from your chamber wander into the pump, the fast-moving vapor jet knocks them downward toward the pump wall, where they are carried to the foreline and removed by the backing pump. The vapor itself condenses on the cooled outer wall and drains back to the boiler to repeat the cycle.

Because nothing in that process relies on tight mechanical tolerances or spinning components, a diffusion pump can run continuously for very long stretches. That reliability is exactly why so many production and research systems still depend on Agilent diffusion pumps today, even alongside newer pump technologies.

Common Applications

Diffusion pumps shine in processes that need a stable, deep vacuum held over long, uninterrupted run times. You will find them at the heart of many of these systems:

•    Thin-film coating and physical vapor deposition, where a clean, deep vacuum protects film quality

•    Vacuum furnaces, brazing, and heat treating in metallurgy

•    Space simulation and environmental test chambers that recreate near-orbit conditions

•    Electron microscopy and surface analysis instruments

•    Research chambers that value quiet, vibration-free pumping

Sizing and Backing Your Diffusion Pump

A diffusion pump does not pull from atmosphere on its own. It needs a backing pump, sometimes called a roughing pump, to first bring the chamber down to a pressure the diffusion pump can take over, and then to keep the foreline clear during operation. Choosing the right backing pump matters just as much as choosing the diffusion pump itself.

Many of our customers pair Agilent diffusion pumps with dry Agilent scroll pumps, which give you clean, oil-free backing and remove any worry about oil migrating back into the system. If you would rather have a complete solution assembled and tested for you, an Agilent pumping station bundles the high vacuum pump, the backing pump, and the controls into one ready-to-run package. And if your process might be better served by a mechanical high vacuum pump instead, it is worth comparing your options against Agilent turbo pumps before you decide.

New, Rebuilt, and Repaired at Provac

One of the advantages of buying from Provac is that you are not locked into a single option. If your budget calls for a rebuilt pump, we can supply one that has been cleaned, inspected, refilled, and tested against real performance targets before it ships. If you need a new pump, we can source that too. And if the pump you already own simply needs attention, our repair service can bring it back to spec without the cost of a full replacement.

Here is what you can count on when you work with us:

•    New and rebuilt inventory that is ready to ship, not weeks out on backorder

•    In-house fluid changes, cleaning, and repair handled by experienced vacuum technicians

•    A warranty on every rebuilt unit, so you are covered after the sale

•    Straightforward guidance on sizing, backing, and fitting the pump into your existing system

Choosing the Right Diffusion Pump Fluid

The fluid you run has a real effect on performance, and it is worth a moment of thought. Different fluids offer different ultimate pressures, different resistance to oxidation if the pump is accidentally exposed to air, and different tolerance for the heat of continuous operation. Silicone-based fluids are prized for their stability and their forgiveness if the pump sees air while hot, which makes them a common choice for general-purpose and industrial work. Other fluids reach lower ultimate pressures and suit cleaner, more demanding vacuum applications. When you buy a pump or a fluid from Provac, we are happy to talk through which fluid fits your process, your budget, and the way your system actually runs day to day.

Maintenance and Long-Term Care

One of the quiet joys of a diffusion pump is how little it asks of you. With no bearings and no rotor in the vacuum path, routine maintenance mostly comes down to keeping the fluid clean and the cooling working. Over time, fluid can darken or break down, especially if the pump is exposed to air at operating temperature, and a fluid change restores performance. Keeping the cooling coils or water lines clear ensures the vapor condenses properly and the pump holds its rated pressure. A pump that is cared for this way can serve for many years, and when it does eventually need deeper attention, our rebuild service is there to handle it.

Frequently Asked Questions

Do you sell both new and rebuilt Agilent diffusion pumps? Yes. We keep new and rebuilt units in stock, and every rebuilt pump is cleaned, inspected, and tested before it ships with a warranty.

Can you repair the diffusion pump I already own? Absolutely. Our technicians handle fluid changes, cleaning, and full rebuilds, which is often far more affordable than buying a replacement.

What backing pump should I use with a diffusion pump? A dry scroll pump is a popular, clean choice, though the right size depends on your diffusion pump and your process. Call us and we will help you match them.

Why Buy Your Diffusion Pump From Provac

Vacuum equipment is a long-term investment, and the company you buy it from should understand how these pumps actually behave in the field. Provac has spent decades selling, rebuilding, and repairing vacuum pumps, and that hands-on experience shows up in the advice we give. We will not push you toward a pump that is oversized for your chamber or undersized for your throughput. We will help you match the pump to the job.

We also keep the full picture in view. A diffusion pump is one piece of a vacuum system, and the parts around it, the backing pump, the fluids, the gauges, and the valves, all affect how well it performs. Because we stock those parts too, we can help you build or maintain the whole system rather than leaving you to source components from a handful of different suppliers.

Explore the Full Agilent Range

Ready to find the right pump? Browse the complete Agilent collection to see how diffusion pumps fit alongside Agilent turbo pumps, scroll pumps, ion pumps, and pumping stations. If you are not certain which model suits your chamber size or process, call us at 831-462-8900 and talk it through with a specialist who works with these pumps every day. We are glad to help you get it right the first time.