Edwards Dry Pumps

Edwards dry pumps deliver oil-free roughing and backing vacuum for semiconductor, industrial and scientific processes. With no oil in the pumping chamber, they keep hydrocarbons out of the process, handle demanding gas loads, and avoid the oil changes and contamination issues of oil-sealed pumps. At Provac Sales, we supply new, rebuilt and factory-rebuilt Edwards dry pumps and rebuild many Edwards dry pump series in house.

Edwards Dry Pump Series in Our Catalog

Our Edwards dry pump collection spans several generations of process and industrial pumps. Current listings include:

• Edwards DP-40 and DP-80 dry pumps, rebuilt
• Edwards EPX-180L, EPX-180N, EPX-500L and EPX-500NE dry pumps, rebuilt and factory rebuilt
• Edwards GV-80 dry pump, rebuilt
• Edwards iGX-100N and iGX-600N dry pumps
• Edwards iH-80, iH-600, iH-1000 and iH-1800 dry pumps
• Edwards iL-70 dry pump, rebuilt
• Edwards iPX-100, iPX-100A, iPX-180A and iPX-500A dry pumps, rebuilt
• Edwards iQDP-40 and iQDP-80 dry pumps, rebuilt
• Edwards iK-500 dry pump
• Edwards iF30K dry pump system

Speeds across the range run from about 32 CFM on an iQDP-40 to more than 1,000 CFM on an iH-1800. Several EPX and iPX models reach ultimate pressures below 7.5 x 10-5 Torr, which lets them back turbo pumps directly in some applications.

How Edwards Dry Pump Technologies Differ

Edwards uses several dry pumping mechanisms, and the right one depends on your process:

• Multi-stage Roots and claw mechanisms, used in the iH, iGX, iQDP and DP series, compress gas through a series of non-contacting rotors and are suited to semiconductor and industrial process duty
• Combined dry and high-vacuum stages, used in the EPX and iPX series, provide a very low ultimate pressure in a compact package for load locks and turbo backing
• Industrial dry pumps such as the Drystar GV series are built for continuous duty in rugged applications, with robust cooling and simple controls

Within a series, suffix letters often indicate the duty rating, purge arrangement or control interface. Two pumps with the same base model can be configured quite differently, so check the product listing or send us the full model and part number so we can confirm the configuration.

How to Choose an Edwards Dry Pump

Matching a dry pump to a process means looking beyond pumping speed alone. Consider:

• Required pumping speed at your working pressure, not only the peak speed
• Ultimate pressure needed, especially if the pump will back a turbo directly
• Process gases, including corrosive, toxic, flammable or condensable species
• Powder or by-product formation, which affects whether you need a process-rated pump
• Purge gas requirements and nitrogen availability
• Cooling water flow and temperature
• Electrical supply, typically 3-phase 200-230V or 460V at 50/60Hz
• Inlet and exhaust connections, for example ISO63, ISO100, ISO160, KF25 or KF40
• Weight and footprint, since larger iH pumps can weigh over 900 lbs

If you are replacing a pump on an existing tool, the original model number is the best starting point. We can then confirm whether a rebuilt unit of the same model, or a compatible alternative, suits your process.

Applications for Edwards Dry Pumps

Edwards dry pumps are used in:

• Semiconductor etch, CVD, PVD, implant and load lock duty
• Flat panel, LED and solar manufacturing
• Thin film coating and vacuum metallizing
• Analytical instruments and research systems needing clean backing vacuum
• Pharmaceutical and chemical processes that cannot tolerate oil
• Industrial drying, degassing and vacuum packaging

For higher speeds in the medium vacuum range, pair your dry pump with an Edwards mechanical booster.

Rebuilt vs New Edwards Dry Pumps

Many Edwards dry pump models, such as the DP, iQDP and EPX series, are no longer in current production but remain installed on thousands of process tools. A rebuilt pump of the same model is often the simplest replacement, because it matches the tool's flanges, controls, utilities and footprint without requalification. New models such as the iGX and iH series suit new installations or upgrades. Each listing states the condition, and factory-rebuilt units are identified separately from our own rebuilds.

Edwards Dry Pump Repair and Rebuild

Provac Sales rebuilds Edwards DP, QDP, iQDP, iGX, iH, EPX, GV, iF, iL and iPX series dry pumps. A rebuild may include inspection, disassembly, cleaning of rotors and stators, replacement of bearings, seals and other worn parts, reassembly, and testing for pumping performance.

Process pumps can carry hazardous residues. Before shipping, submit an RMA request and complete the contamination data sheet in full, including the process gases the pump has handled. See our pump repair page for details.

Frequently Asked Questions

Can an Edwards dry pump replace an oil-sealed pump?

In many cases, yes. Dry pumps remove the need for oil changes and exhaust filtration. Check that the replacement meets your speed, ultimate pressure and utility requirements.

What do the L, N and NE suffixes mean on EPX pumps?

The suffixes indicate variants for different process duties and features. Send us the full part number and we will confirm the configuration.

Do Edwards dry pumps need nitrogen purge?

Many process-rated models use nitrogen purge to protect bearings and dilute process gases. Light-duty models may run without it. Purge requirements are listed in each pump's manual.

Why is my dry pump tripping on high current?

Common causes include process deposits on the rotors, bearing wear, a blocked exhaust or a cooling problem. Contact us before restarting a pump that has tripped repeatedly.

Can I run an Edwards process dry pump in a lab?

Some lighter-duty models suit labs and instruments, but large process pumps such as the iH-1000 or iH-1800 need 3-phase power, cooling water and floor space for a pump weighing close to half a ton. For bench-top work, a scroll pump is usually more practical.

Installation Considerations for Edwards Dry Pumps

A successful dry pump installation depends on the utilities around the pump as much as the pump itself. Before your rebuilt or new Edwards dry pump arrives, check:

• Cooling water supply, flow rate and inlet temperature against the pump's requirements
• Nitrogen purge supply and regulator setting for process-rated models
• Exhaust routing, including whether exhaust must go to a scrubber or abatement system
• Electrical supply, breaker size and phase rotation
• Interface cables and signals for tool integration, alarms and remote start
• Floor loading, access for lifting equipment and clearance for service

Getting these points right avoids early trips, overheating and nuisance alarms. If you are installing a pump on a tool that has been idle, check the foreline and exhaust lines for deposits before start-up, since built-up by-products can restrict flow and stress a freshly rebuilt pump.

Request a Quote on Edwards Dry Pumps

Send us the Edwards model and part number, the required condition, voltage, inlet size and your process details. We will check inventory or quote a rebuild of your existing pump. Contact us or call 831-462-8900.