Shimadzu Turbo Pump Controllers and Power Supplies

A Shimadzu turbo pump cannot run on its own. Its power supply drives the motor, controls the magnetic bearings that hold the rotor and shuts the pump down safely when something goes wrong.

When a power supply fails, the fastest fix is an exact replacement that matches the pump, its suffix and its cables. At Provac Sales, we supply Shimadzu turbo pump controllers and power supplies and help you confirm the match before you order.

Shimadzu Power Supply Models We Carry

EI-R04M

• Runs the TMP-1003 and TMP-2203 series pumps
• Single-phase 200 to 240 V input, up to 1.2 kVA with a TMP-2203
• About 8 kg, with no battery needed

EI-S04M

• Runs the compact TMP-203
• Single-phase 100 to 120 V or 200 to 240 V input, up to 450 VA

EI-D Series

• EI-D1003M, EI-D1103M, EI-D1303M, EI-D2003M, EI-D2203M, EI-D2303M, EI-D3203M, EI-D3403M and EI-D4203M
• Each EI-D unit is matched to one pump model, such as the EI-D4203M for the TMP-4203LMC
• Single-phase 200 to 240 V input, up to 1.5 kVA on the EI-D4203M

Some listings show a price and others are quote-based. Each product page lists the matching pump, input voltage and connections. Units built for tool makers may carry an extra suffix, such as (T6), so match that suffix as well.

What a Turbo Pump Power Supply Does

The power supply runs the pump's motor and holds the rotor on five-axis magnetic bearings, adjusting the magnets constantly as sensors report the rotor position. It monitors speed and pump temperature and stops the pump on a fault.

If mains power fails, the power supply uses the energy coming back from the slowing motor to keep the bearings working until the rotor stops. That is why Shimadzu power supplies need no battery.

Front Panel, Remote and Serial Control

EI-D units have a 2-line LCD with POWER, ROTATION, NORMAL SPEED and ALARM lights. Remote contact I/O accepts START, STOP, RESET and LOW SPEED inputs and reports rotation, acceleration, braking, normal speed, remote, alarm and warning status.

RS-232C and RS-485 ports allow full serial control. Speed can be set from 25 to 100% of rated speed in 0.1% steps.

Key Features

• Five-axis magnetic bearing control
• No battery needed for power failure protection
• Variable speed from 25 to 100% of rated speed
• Remote contact I/O and RS-232C and RS-485 serial ports
• Alarm history for troubleshooting, up to 99 events on EI-D units
• Control and motor cables from 3 to 30 m

Applications for Shimadzu Turbo Pump Controllers

• Replacing a failed power supply on a semiconductor, FPD or coating tool
• Spare units for fabs that run many Shimadzu turbo pumps
• Rack-mounted or remote installations that need long cables
• Research systems that need serial monitoring and speed control

How to Choose the Right Shimadzu Power Supply

Before ordering, confirm:

• The pump model and suffix, such as TMP-1003LMC
• The power supply model on your current unit, including any tool-maker suffix
• Input voltage and available power
• Control and motor cable lengths
• Whether you use remote I/O or serial control

Cables and Compatibility

Each system uses a control cable, a motor cable and a power cable. Control cables come in 3, 5, 7, 10, 15, 20 and 30 m lengths, and motor cables differ between air-cooled and wide-range pumps. Cables only swap between units of the same series, so tell us the cable part numbers you have when you order.

Maintenance Tips

• Leave space for airflow, at least 30 mm above and 50 mm behind EI-D units
• Never connect or disconnect the control cable with the power on
• Never unplug cables while the pump is running
• Avoid cutting power to a running pump
• Plan for electrolytic capacitor and cooling fan replacement at about 5 years and the transformer at about 10 years

Signs Your Power Supply Needs Service

• Power supply malfunction alarm
• The pump will not start or shows a startup failure
• Dead display or status lights
• A cooling fan that is noisy or not turning
• Repeated overload or bearing alarms with a pump that tests good on another supply

Shimadzu Turbo Pump Controllers Repair

Provac Sales handles repair requests for Shimadzu turbo pump power supplies and pumps. Submit an RMA request before shipping and include the power supply model, serial number, the pump it runs and the alarm history. See our pump repair page for more information.

Related Collections

• Shimadzu turbo pumps, magnetically levitated TMP pumps
• Edwards turbo pump controllers
• Leybold turbo pump controllers
• All Shimadzu products
• All turbo pumps from every brand we carry

Find the Right Shimadzu Turbo Pump Controller

Send us your power supply model, the pump model and suffix, input voltage, cable lengths and how you control the pump. We will confirm the right Shimadzu power supply, check availability or quote a repair of your existing unit.

Browse our inventory above or contact our vacuum specialists at 831-462-8900.

Shimadzu Turbo Pump Controller FAQ

1. Can I run my Shimadzu turbo pump from a different power supply?

Only from the power supply model built for that pump. The TMP-1003 and TMP-2203 series use the EI-R04M, the TMP-203 uses the EI-S04M, and EI-D units are each matched to one pump model.

2. Do Shimadzu turbo pump power supplies need a battery?

No. During a power failure, the power supply uses energy from the slowing motor to keep the magnetic bearings working until the rotor stops.

3. What cables does a Shimadzu power supply need?

It needs a control cable, a motor cable and a power cable. Control and motor cables come in lengths from 3 to 30 m and only swap between units of the same series.

4. What is the difference between EI-D and EI-R04M power supplies?

EI-D units are an earlier series, each matched to one pump model. The EI-R04M is the power supply Shimadzu lists for the TMP-1003 and TMP-2203 series pumps.

5. How long do Shimadzu power supply parts last?

Shimadzu estimates about 5 years for the electrolytic capacitors and cooling fan and about 10 years for the transformer. Older units should have these parts checked or replaced.