Shimadzu Magnetically Levitated Turbo Molecular Pumps

A turbo molecular pump gives clean, oil-free high vacuum by striking gas molecules with fast-spinning rotor blades and driving them toward the exhaust. Shimadzu turbo pumps hold that rotor on magnetic bearings, so nothing touches it while it spins and there is no lubricant anywhere in the pump.

Shimadzu, a Japanese instrument maker, builds its turbo pumps in-house and is one of the leading makers of magnetically levitated turbo pumps for semiconductor, flat panel display and coating tools. At Provac Sales, we supply Shimadzu turbo pumps and their matching power supplies, and we help you match the pump, suffix and controller to your tool.

Shimadzu Turbo Pump Models We Carry

Compact and Mid-Size Pumps

• TMP-203, VG100, ICF152 or ISO100 inlet, about 190 L/s for nitrogen at 50,000 rpm, run from the EI-S04M power supply
• TMP-303 and TMP-403, mid-size pumps for analytical, inspection and small process chambers
• TMP-803, a larger mid-size pump for PVD, load lock and research chambers

High-Flow Pumps

• TMP-1003, VG200, ICF253 or ISO200 inlet, about 1,080 L/s for nitrogen at 35,000 rpm, run from the EI-R04M power supply
• TMP-2203, VG250, ICF305 or ISO250 inlet, about 2,140 L/s for nitrogen at 24,600 rpm, run from the EI-R04M power supply
• TMP-3304, TMP-4203 and larger pumps for high-flow CVD and etch tools

Some listings show a price and others are quote-based. Each product page lists inlet flange, suffix, cooling and the matching power supply.

Understanding Shimadzu Model Suffixes

The letters after the model number tell you how the pump is built. Order the same suffix as the pump you are replacing.

• M models are the standard magnetically levitated pumps for clean processes such as PVD and inspection equipment
• L, as in the LM, marks a wide-range design that handles higher gas flow and backing pressure
• C, as in the LMC, marks a chemical-duty version for reactive process gases, run with a gas purge
• T, as in the LMTC, adds temperature control for etch and CVD processes that leave reaction products in the pump

How a Magnetically Levitated Turbo Pump Works

A motor spins a rotor with many rows of angled blades between rows of fixed stator blades. Each blade row knocks gas molecules toward the next row down, so the gas is compressed in stages until it reaches the exhaust port, where a backing pump removes it.

Five-axis active magnetic bearings hold the rotor in place with no contact. Sensors track the rotor position and the power supply adjusts the magnets continuously. If power fails, the motor acts as a generator while it slows, which keeps the bearings working until the rotor comes to a safe stop.

Key Features

• Oil-free high vacuum with no lubricant in the pump
• Magnetic bearings with no contact wear and very low vibration
• Mount in any orientation on most models
• Speed adjustable from 25 to 100% of rated speed
• No battery needed for power failure protection
• Remote I/O and RS-232C or RS-485 serial control through the power supply

Applications for Shimadzu Turbo Pumps

• Semiconductor CVD, etch and ion implant tools
• PVD and sputtering systems
• Flat panel display and solar cell production
• Optical and industrial coating
• Inspection systems, electron microscopes and analytical instruments
• Research and ultra-high vacuum chambers

How to Choose the Right Shimadzu Turbo Pump

Before ordering, confirm:

• Inlet flange size and type, such as VG, ICF (ConFlat) or ISO
• Pumping speed needed for your gas load and chamber volume
• Process type, clean or reactive, to choose between M, LM, LMC and LMTC
• Water or air cooling
• The backing pump size and the foreline pressure it holds
• The matching power supply and the control and motor cable lengths

Matching Power Supplies and Cables

Every Shimadzu turbo pump runs from a specific power supply. The TMP-203 uses the EI-S04M, and the TMP-1003 and TMP-2203 series use the EI-R04M. Earlier generations use EI-D series power supplies, such as the EI-D4203M for the TMP-4203LMC.

Control and motor cables come in lengths from 3 to 30 m and must match the pump series. See our Shimadzu turbo pump controllers for replacement units.

Maintenance Tips

• Keep cooling water flow, pressure and temperature inside the limits in the manual
• Run the gas purge on chemical-duty pumps whenever process gas flows
• Do not cut power while the pump is running, since repeated power-loss stops wear the backup bearings
• Keep the inlet screen fitted to stop debris from reaching the rotor
• Vent slowly with dry nitrogen after the rotor stops
• Check the alarm history on the power supply when a pump trips

Signs Your Turbo Pump Needs Service

• Magnetic bearing or overload alarms
• The pump is slow to reach normal speed or will not start
• New noise or vibration at full speed
• Base pressure higher than before
• Pump temperature alarms with normal cooling water

Shimadzu Turbo Pumps Repair

Provac Sales handles repair requests for Shimadzu turbo pumps and power supplies. Submit an RMA request and complete the contamination data sheet before shipping, especially for pumps used on chemical processes.

Include the pump model and suffix, the serial number, the power supply model and any alarm codes. See our pump repair page for more information.

Related Collections

• Shimadzu turbo pump controllers, EI-R04M, EI-S04M and EI-D power supplies
• Kashiyama dry pumps, NeoDry backing pumps for turbo pumps
• Welch scroll pumps, oil-free backing pumps for smaller turbo pumps
• All Shimadzu products
• All turbo pumps from every brand we carry

Find the Right Shimadzu Turbo Pump

Send us your pump model and suffix, inlet flange, power supply model, process type and cooling. We will confirm the right Shimadzu turbo pump and power supply, check availability or quote a repair of your existing pump.

Browse our inventory above or contact our vacuum specialists at 831-462-8900.

Shimadzu Turbo Pump FAQ

1. Does a Shimadzu turbo pump need oil?

No. Shimadzu turbo pumps use magnetic bearings, so the rotor never touches the housing and there is no oil or grease in the pump.

2. Which power supply runs my Shimadzu turbo pump?

Each pump has a matching power supply. The TMP-203 uses the EI-S04M, the TMP-1003 and TMP-2203 series use the EI-R04M, and earlier pumps use EI-D series units. Send us your pump model and suffix and we will confirm the match.

3. What do the LM, LMC and LMTC suffixes mean?

L marks the wide-range design for higher gas flow, C marks the chemical-duty version for reactive gases, and T adds temperature control for processes that leave reaction products. Replace a pump with the same suffix.

4. What happens to a Shimadzu turbo pump during a power failure?

The motor turns into a generator as the rotor slows and powers the magnetic bearings until the rotor stops safely. No battery is needed, but repeated power-loss stops shorten backup bearing life.

5. What backing pump does a Shimadzu turbo pump need?

Size the backing pump to your gas load and the pump's foreline limit. Shimadzu recommends 500 L/min or more for a TMP-1003 running a gas purge. Dry pumps such as the Kashiyama NeoDry keep the foreline oil-free.