Pfeiffer
Backing pump | oil free backing pump |
Capacity of backing pump | 20.6 CFM |
Minimum detectable leak rate for He | 1 x 10-12 mbar l/s (vacuum) |
1 x 10-8 mbar l/s (sniffing) | |
Applications | semiconductor industry • large area coating • solar industry • accelerators • vacuum components (feedthroughs, valves, bellows, expansion joints) • laser technology • ultra-pure media supply • electronics • aeronautics • medical technology |